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Pull-in study of an electrostatic torsion microactuator.
- Source :
-
Journal of Microelectromechanical Systems . Dec98, Vol. 7 Issue 4, p373. 7p. - Publication Year :
- 1998
-
Abstract
- Presents pull-in analysis for an electrostatic torsion microactuator. Use of the torsion microactuator as a microtorsion mirror; Fabrication process; Measurements.
- Subjects :
- *ACTUATORS
*TORSION
*ELECTROSTATIC apparatus & appliances
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 7
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 1386484
- Full Text :
- https://doi.org/10.1109/84.735344