Thermal modelling for conformal polishing in inductively coupled atmospheric pressure plasma processing.

MLA

Ji, Peng, et al. “Thermal Modelling for Conformal Polishing in Inductively Coupled Atmospheric Pressure Plasma Processing.” Optik - International Journal for Light & Electron Optics, vol. 182, Apr. 2019, pp. 415–23. EBSCOhost, https://doi.org/10.1016/j.ijleo.2019.01.049.

APA

Ji, P., Jin, H., Li, D., Su, X., Liu, K., & Wang, B. (2019). Thermal modelling for conformal polishing in inductively coupled atmospheric pressure plasma processing. Optik - International Journal for Light & Electron Optics, 182, 415–423. https://doi.org/10.1016/j.ijleo.2019.01.049

Chicago

Ji, Peng, Huiliang Jin, Duo Li, Xing Su, Kan Liu, and Bo Wang. 2019. “Thermal Modelling for Conformal Polishing in Inductively Coupled Atmospheric Pressure Plasma Processing.” Optik - International Journal for Light & Electron Optics 182 (April): 415–23. doi:10.1016/j.ijleo.2019.01.049.