Real-time measurement of microcantilever displacement based on Linnik microscopic speckle interferometer.

Nowadays, the application of MEMS is more and more important. With the development of microstructure technology, higher requirements are also placed on measurement methods. However, the current measurement methods cannot meet these requirements due to their own limitations. We developed a method based on the temporal microscopic speckle interferometry, which has advantages of real-time, full field, high-precision, and nondestructive. The interferometer based on Linnik microscopic structure is built up. The corresponding displacement measuring experiments have been performed, and the measurement errors are <0.05 µm. The experimental results demonstrate the validity of our homemade device. [ABSTRACT FROM AUTHOR]