(AlCrMoNbZr)１-x-yNyOx 高熵合金涂层的制备及性能研究.

In this paper, the single target power adjustable characteristics of multi target magnetron co-sputte-ring technology were adopted. (AlCrMoNbZr)１－x－yNyOx high entropy alloy coatings were deposited on Zr-4 substrates by adjusting O2 flow rate. X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscope (AFM), nano-indentation and electrochemical workstation were used to characterize the microstructure 9 morphology, nano-hardness and corrosion resistance of the (AlCrMoNbZr)１－x－yNyOx high entropy alloy coating with different O2 flow. The results showed that the phase structure of the coating was completely transformed from fee to bcc and maintained a stable bcc structure with the increase of O2 flow from 0 to 15 mL/min. The coating nano-hardness decreased from 22 to 7 GPa with the increase of O2 flow. The (AlCrMoNbZr)１－x－yNyOx high entropy alloy coating with O2 flow of 10 mL/min exhibited excellent corrosion resistance, and its corrosion current density was about 6 times lower than that of the (AlCrMoNbZr) N coating with O2 flow rate of 0 mL/min. [ABSTRACT FROM AUTHOR]