SyLMAND: a microfabrication beamline with wide spectral and beam power tuning range at the Canadian Light Source.

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices, is a recently commissioned microfabrication bend magnet beamline with ancillary cleanroom facilities at the Canadian Light Source. The synchrotron radiation is applied to pattern high‐aspect‐ratio polymer microstructures used in the area of micro‐electro‐mechanical systems (MEMS). SyLMAND particularly focuses on spectral and beam power adjustability and large exposable area formats in an inert gas atmosphere; a rotating‐disk intensity chopper allows for independent beam‐power reduction, while continuous spectral tuning between 1–2 keV and >15 keV photon energies is achieved using a double‐mirror system and low‐atomic‐number filters. Homogeneous exposure of samples up to six inches in diameter is performed in the experimental endstation, a vertically scanning precision stage (scanner) with tilt and rotation capabilities under 100 mbar helium. Commissioning was completed in late 2017, and SyLMAND is currently ramping up its user program, mostly in the areas of RF MEMS, micro‐fluidics/life sciences and micro‐optics. Microfabrication of high‐aspect‐ratio polymer structures using deep X‐ray lithography benefits from independent beam‐power and spectral tuning now available at the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source. [ABSTRACT FROM AUTHOR]