Simulation Study of Total-Electron-Yield X-ray Standing-Wave Spectra of Mo/SiC/Si/SiC and Mo/Si Multilayers.

Total-electron-yield X-ray standing-wave (TEY-XSW) spectra of Mo/SiC/Si/SiC multilayers (Muramatsu et al., Jpn. J. Appl. Phys., 41 (2002) 4250.) were simulated by the use of the calculation method for TEY spectra of multilayers. The existence of a 2Å thick SiO2 and a 18Å thick Mo layers on the periodic Mo/SiC/Si/SiC multilayer was confirmed. In addition, the simulation study on Mo/Si multilayers covered with top Mo layers was performed. The TEY-XSW spectra were sensitive to the thickness of the top Mo layer as for the spectral shapes and peak positions. It was made clear that the TEY-XSW method is useful to elucidate the multilayer structure near the top layer. © 2004 American Institute of Physics [ABSTRACT FROM AUTHOR]