Iron(III) β-diketonates: CVD precursors for iron oxide film formation.

Graphical abstract Highlights • Synthesis and characterization of iron(III) β-diketonate complexes [Fe(β-diketonate) 3 ]. • Their use as MOCVD precursor for Fe 2 O 3 thin film formation. • Single crystal X-ray structure determination of two samples. Abstract Complexes [Fe(β-diketonate) 3 ] (β-diketonate = 2-acetylcyclopentanoate (3a), = 2-acetylcyclohexanoate (3b), = 4,4-dimethyl-1-phenyl pentanedionate (3c)) were synthesized by the reaction of FeCl 3 with the respective β-diketones in presence of NaOH. The molecular structures of 3a and 3c in the solid state are discussed, confirming an octahedral coordination sphere at Fe(III) setup by the three bidentate-bonded β-diketonato ligands. Variation of the β-diketonato ligands allowed to influence the thermal behavior and vapor pressure of the complexes. TG-MS (= Thermo Gravimetry-Mass Spectrometry) studies, exemplarily carried out on 3a , confirmed the release of the β-diketonate ligands. Complexes 3a – c were applied as MOCVD (=Metal-Organic Chemical Vapor Deposition) precursors for the deposition of Fe 2 O 3 thin films on silicon substrates. It was found that with 3a , b , conformal and dense carbon-free γ- and α-Fe 2 O 3 layers were produced at 450 °C, which was verified by scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray photon spectroscopy. [ABSTRACT FROM AUTHOR]