Defect generation by nitrogen during pulsed sputter deposition of GaN.

MLA

Steib, Frederik, et al. “Defect Generation by Nitrogen during Pulsed Sputter Deposition of GaN.” Journal of Applied Physics, vol. 124, no. 17, Nov. 2018, p. N.PAG. EBSCOhost, https://doi.org/10.1063/1.5037340.

APA

Steib, F., Remmele, T., Gülink, J., Fündling, S., Behres, A., Wehmann, H.-H., Albrecht, M., Straßburg, M., Lugauer, H.-J., & Waag, A. (2018). Defect generation by nitrogen during pulsed sputter deposition of GaN. Journal of Applied Physics, 124(17), N.PAG. https://doi.org/10.1063/1.5037340

Chicago

Steib, Frederik, Thilo Remmele, Jan Gülink, Sönke Fündling, Alexander Behres, Hergo-Heinrich Wehmann, Martin Albrecht, Martin Straßburg, Hans-Jürgen Lugauer, and Andreas Waag. 2018. “Defect Generation by Nitrogen during Pulsed Sputter Deposition of GaN.” Journal of Applied Physics 124 (17): N.PAG. doi:10.1063/1.5037340.