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Influence of Deposition Temperature and Source Gas in PE-CVD for SiO2 Passivation on Performance and Reliability of In–Ga–Zn–O Thin-Film Transistors.
- Source :
-
IEEE Transactions on Electron Devices . Aug2018, Vol. 65 Issue 8, p3257-3263. 7p. - Publication Year :
- 2018
-
Abstract
- In this paper, we investigated the influence of both source gas and deposition temperature in plasma-enhanced chemical vapor deposition (PE-CVD) for a SiO2 passivation layer on the electrical properties and reliability of a bottom-gate In–Ga–Zn–O thin-film transistor (IGZO TFT). Two gas chemistries consisting of SiH4–N2O–N2 and tetraethoxysilane (TEOS)–O2 were utilized as the source gases for the PE-CVD SiO2 deposition, and the deposition temperature (${T}_{D}$) was adjusted from 180 °C to 380 °C. The TFT properties were basically identical for both gas chemistries at ${T}_{D}$ of 180 °C. When ${T}_{D}$ increased to 300 °C or higher, the TFTs with the SiO2 passivation deposited by SiH4–N2O–N2 gas chemistry (SiH4-SiO2) drastically changed from the transistor to the conductor. In contrast, the TFT with TEOS-SiO2 passivation maintained its TFT characteristics even at ${T}_{D}$ of 380 °C, despite the degradation of subthreshold characteristics and a negative shift of turn-on voltage were observed due to an electron injection barrier lowering as ${T}_{D}$ increased to 310 °C or higher. We also revealed that a stacked SiO2 passivation that is deposited at a different ${T}_{D}$ is an effective technique to improve the performance and reliability of the IGZO TFT. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 65
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 132684362
- Full Text :
- https://doi.org/10.1109/TED.2018.2841978