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Compact low-energy electron microscope for surface imaging
- Source :
-
Review of Scientific Instruments . Oct98, Vol. 69 Issue 10, p3583. 5p. 7 Black and White Photographs, 3 Diagrams, 1 Chart, 2 Graphs. - Publication Year :
- 1998
-
Abstract
- Describes a compact electrostatic low-energy electron microscope. Optimization electron optical system of the microscope; Separation of beams using magnetic sector with small deflection angle; Magnification rate of the three-lens projector system.
- Subjects :
- *ELECTRON microscopes
*ELECTRON beams
*PROJECTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 69
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 1318369
- Full Text :
- https://doi.org/10.1063/1.1149142