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Micro-temperature sensor array with thin-film thermocouples.
- Source :
-
Electronics Letters (Institution of Engineering & Technology) . 5/13/2004, Vol. 40 Issue 10, p599-601. 3p. - Publication Year :
- 2004
-
Abstract
- A micro-temperature sensor array with thin-film thermocouples (TFTCs) is developed. The TFTCs are made with T-type (copper-constantan) thermocouples to measure chip temperature distribution of electronic packaging. The sensor array of 150 nm thickness has 10 × 10 junctions within a 9 × 9 mm area. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00135194
- Volume :
- 40
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Electronics Letters (Institution of Engineering & Technology)
- Publication Type :
- Academic Journal
- Accession number :
- 13125053
- Full Text :
- https://doi.org/10.1049/el:20040387