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Micro-temperature sensor array with thin-film thermocouples.

Authors :
Park, J. -J.
Taya, M.
Source :
Electronics Letters (Institution of Engineering & Technology). 5/13/2004, Vol. 40 Issue 10, p599-601. 3p.
Publication Year :
2004

Abstract

A micro-temperature sensor array with thin-film thermocouples (TFTCs) is developed. The TFTCs are made with T-type (copper-constantan) thermocouples to measure chip temperature distribution of electronic packaging. The sensor array of 150 nm thickness has 10 × 10 junctions within a 9 × 9 mm area. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00135194
Volume :
40
Issue :
10
Database :
Academic Search Index
Journal :
Electronics Letters (Institution of Engineering & Technology)
Publication Type :
Academic Journal
Accession number :
13125053
Full Text :
https://doi.org/10.1049/el:20040387