Residual-free reactive ion etching of gold layers.

MLA

Franz, Gerhard, et al. “Residual-Free Reactive Ion Etching of Gold Layers.” AIP Advances, vol. 8, no. 7, July 2018, p. N.PAG. EBSCOhost, https://doi.org/10.1063/1.5037886.

APA

Franz, G., Oberhausen, W., Meyer, R., & Amann, M.-C. (2018). Residual-free reactive ion etching of gold layers. AIP Advances, 8(7), N.PAG. https://doi.org/10.1063/1.5037886

Chicago

Franz, Gerhard, Wolfhard Oberhausen, Ralf Meyer, and Markus-Christian Amann. 2018. “Residual-Free Reactive Ion Etching of Gold Layers.” AIP Advances 8 (7): N.PAG. doi:10.1063/1.5037886.