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Acoustic Dispersion Analysis of the Resonant Modes in FBAR.
- Source :
-
Annual Journal of Electronics . 2015, Vol. 9, p50-52. 3p. - Publication Year :
- 2015
-
Abstract
- A procedure to build a two dimensional finite element model (FEM) of thin film bulk acoustic wave resonator (FBAR) and obtain the dispersion curves of its resonant modes is described in this article. A classic parallel plate device is analyzed and the dispersion curves of its main spurious harmonics are given. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 13131842
- Volume :
- 9
- Database :
- Academic Search Index
- Journal :
- Annual Journal of Electronics
- Publication Type :
- Conference
- Accession number :
- 131038697