Young’s modulus of multi-layer microcantilevers.

A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typical theoretical models (Rayleigh-Ritz model, Euler-Bernoulli (E-B) beam model and spring mass model), the proposed theoretical model can obtain Young’s modulus of multilayer microcantilevers more precisely. Also, the influences of coating’s geometric dimensions on Young’s modulus and resonant frequency of microcantilevers are discussed. The thickness of coating has a great influence on Young’s modulus and resonant frequency of multi-layer microcantilevers, and the coating should be considered to calculate Young’s modulus more precisely, especially when fairly thicker coating is employed. [ABSTRACT FROM AUTHOR]