Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design.

MLA

Jeong, Yaesuk, et al. “Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design.” Journal of Microelectromechanical Systems, vol. 26, no. 6, Dec. 2017, pp. 1335–44. EBSCOhost, https://doi.org/10.1109/JMEMS.2017.2744260.

APA

Jeong, Y., Serrano, D. E., & Ayazi, F. (2017). Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design. Journal of Microelectromechanical Systems, 26(6), 1335–1344. https://doi.org/10.1109/JMEMS.2017.2744260

Chicago

Jeong, Yaesuk, Diego Emilio Serrano, and Farrokh Ayazi. 2017. “Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design.” Journal of Microelectromechanical Systems 26 (6): 1335–44. doi:10.1109/JMEMS.2017.2744260.