Cite
MEMS fabrication and frequency sweep for suspending beam and plate electrode in electrostatic capacitor.
MLA
Zhu, Jianxiong, and Weixing Song. “MEMS Fabrication and Frequency Sweep for Suspending Beam and Plate Electrode in Electrostatic Capacitor.” Solid-State Electronics, vol. 139, Jan. 2018, pp. 94–100. EBSCOhost, https://doi.org/10.1016/j.sse.2017.10.039.
APA
Zhu, J., & Song, W. (2018). MEMS fabrication and frequency sweep for suspending beam and plate electrode in electrostatic capacitor. Solid-State Electronics, 139, 94–100. https://doi.org/10.1016/j.sse.2017.10.039
Chicago
Zhu, Jianxiong, and Weixing Song. 2018. “MEMS Fabrication and Frequency Sweep for Suspending Beam and Plate Electrode in Electrostatic Capacitor.” Solid-State Electronics 139 (January): 94–100. doi:10.1016/j.sse.2017.10.039.