Cite
The formation of SiCN film on Si substrate by constant-source diffusion.
MLA
He, X. L., et al. “The Formation of SiCN Film on Si Substrate by Constant-Source Diffusion.” Thin Solid Films, vol. 642, Nov. 2017, pp. 124–28. EBSCOhost, https://doi.org/10.1016/j.tsf.2017.09.034.
APA
He, X. L., Chai, X. Z., Yu, L., Han, P., Fan, S., Huang, L., Tao, T., Li, Z. Y., Xie, Z. L., Xiu, X. Q., Chen, P., Liu, B., Hua, X. M., Zhao, H., Zhang, R., & Zheng, Y. D. (2017). The formation of SiCN film on Si substrate by constant-source diffusion. Thin Solid Films, 642, 124–128. https://doi.org/10.1016/j.tsf.2017.09.034
Chicago
He, X.L., X.Z. Chai, L. Yu, P. Han, S. Fan, L. Huang, T. Tao, et al. 2017. “The Formation of SiCN Film on Si Substrate by Constant-Source Diffusion.” Thin Solid Films 642 (November): 124–28. doi:10.1016/j.tsf.2017.09.034.