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PVD Still in for the Long Haul.

Authors :
Chappell, Jeff
Source :
Electronic News. 2/23/2004, Vol. 50 Issue 8, pN.PAG. 0p.
Publication Year :
2004

Abstract

Discusses the issues on physical vapor deposition (PVD) manufacturing process for semiconductors. Introduction of atomic layer deposition; Other deposition technologies used by vendors; Upgrade of the Endura deposition tool of Applied Materials Inc.

Subjects

Subjects :
*PHYSICAL vapor deposition
*VAPOR-plating
*MANUFACTURING processes
*SEMICONDUCTORS
*SEMICONDUCTOR industry

Details

Language :
English
ISSN :
10616624
Volume :
50
Issue :
8
Database :
Academic Search Index
Journal :
Electronic News
Publication Type :
Periodical
Accession number :
12553291

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Authors Abstract Subjects Details