Microstructure-dependent dynamic behavior of torsional nano-varactor.

Experiments depict that the physico-mechanical response of miniature devices is microstructure-dependent. However, the classic continuum theory cannot correctly predict the microstructure-dependency. In this paper, the strain gradient theory is employed to examine the dynamic behavior and instability characteristics of miniature varactor with trapezoidal geometry. The governing equation of the varactor is obtained incorporating the effects of Coulomb force, van der Waals (vdW) attraction, squeeze film damping and structural damping. The influences of microstructure on the dynamic instability of equilibrium points are studied by plotting the phase portrait and bifurcation diagrams. It is found that increase in the microstructure parameter enhances the torsional stability. In the presence of the applied voltage, the phase portrait shows the saddle-node bifurcation while for free-standing varactor a subcritical pitchfork bifurcation is observed. [ABSTRACT FROM AUTHOR]