Inductively coupled plasma surface modification of polyethylene terephthalate and application in a triboelectric generator.

We herein report our investigation into the effect of plasma-induced surface modification of a polyethylene terephthalate (PET) surface on the output performance of a triboelectric generator (TEG). The PET surface was subjected to plasma treatment using a CF 4 /CH 4 /Ar gas mixture (25–75% CF 4 ) to increase the surface roughness and triboelectric charge density. Plasma diagnostics were then performed using optical emission spectroscopy and a double Langmuir probe, while analysis of the surface roughness and surface characteristics was performed using atomic force microscopy and X-ray photoelectron spectroscopy, respectively. Following plasma treatment, we prepared a triboelectric energy harvester device, and demonstrated an outstanding improvement in TEG short-circuit current measurements. [ABSTRACT FROM AUTHOR]