MODELING OF A TWO-AXIS TORSIONAL MICROMIRROR USING AHDL.

This paper presents the development of a reduced-order macro-model for a two-axis electrostatic torsional micromirror using analog hardware description language (AHDL). The proposed macromodel permits extremely fast simulation while providing nearly FEM accuracy. This enables the user to investigate the close-loop controlled global system level performances at acceptable computational cost. [ABSTRACT FROM AUTHOR]