Features of microstructure of ZrN, Si3N4 and ZrN/SiNx nanoscale films irradiated by Xe ions.

MLA

Uglov, V. V., et al. “Features of Microstructure of ZrN, Si3N4 and ZrN/SiNx Nanoscale Films Irradiated by Xe Ions.” Vacuum, vol. 143, Sept. 2017, pp. 491–94. EBSCOhost, https://doi.org/10.1016/j.vacuum.2017.03.015.

APA

Uglov, V. V., Abadias, G., Zlotski, S. V., Saladukhin, I. A., Safronov, I. V., Shymanski, V. I., Janse van Vuuren, A., O’Connell, J., Skuratov, V., & Neethling, J. H. (2017). Features of microstructure of ZrN, Si3N4 and ZrN/SiNx nanoscale films irradiated by Xe ions. Vacuum, 143, 491–494. https://doi.org/10.1016/j.vacuum.2017.03.015

Chicago

Uglov, V.V., G. Abadias, S.V. Zlotski, I.A. Saladukhin, I.V. Safronov, V.I. Shymanski, A. Janse van Vuuren, J. O’Connell, V. Skuratov, and J.H. Neethling. 2017. “Features of Microstructure of ZrN, Si3N4 and ZrN/SiNx Nanoscale Films Irradiated by Xe Ions.” Vacuum 143 (September): 491–94. doi:10.1016/j.vacuum.2017.03.015.