An automatic approach and grip method of micro-particle in 3D space.

Micro-particle is hard to be observed as small scale and hard to be gripped as micro-force from substrate, an automatic approach and grip method of micro-particle in the guide of microscopic vision systems is proposed in the paper to grip micro-particle. First, the micro-gripper driven by electrostatic force is introduced and forces in gripping process are analyzed. Second, a micro-assembly robot composed of two microscopic vision systems is established to monitor micro-operation process and to operate micro-particle. Image features of micro-particle and micro-gripper end-effector are extracted by image feature extraction method to calculate relative position of micro-particle and micro-gripper in image space. Last, a movement control strategy in 3D space based on image Jacobian matrix is studied to control micro-gripper approach and align with micro-particle. Experimental results verified the effectiveness of proposed methods. [ABSTRACT FROM AUTHOR]