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Subthreshold behavior of triple-gate MOSFETs on SOI material

Authors :
Lemme, M.C.
Mollenhauer, T.
Henschel, W.
Wahlbrink, T.
Baus, M.
Winkler, O.
Granzner, R.
Schwierz, F.
Spangenberg, B.
Kurz, H.
Source :
Solid-State Electronics. Apr2004, Vol. 48 Issue 4, p529. 6p.
Publication Year :
2004

Abstract

The fabrication of n-type multi-wire MOSFETs on SOI material with triple-gate structures is presented. The output and transfer characteristics of devices with a gate length of 70 nm and a MESA width of 22 nm demonstrate clearly the suppression of short channel effects (SCE). In addition, these triple-gate structures are compared with planar SOI devices of comparable dimensions. The influence of biasing the substrate (back gate) is analyzed and compared to simulation data. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
00381101
Volume :
48
Issue :
4
Database :
Academic Search Index
Journal :
Solid-State Electronics
Publication Type :
Academic Journal
Accession number :
12167919
Full Text :
https://doi.org/10.1016/j.sse.2003.09.027