Continuous Color Reflective Display Fabricated in Integrated MEMS-and-TFT-on-Glass Process.

The single mirror interferometric MEMS display is a full-color, daylight-visible, video-rate reflective display with high brightness that consumes power only during content updates. It consists of an array of identical pixels each of which can produce a continuous range of colors through precise analog positioning of one moving element, a mirror. Electrostatic actuation is driven with an integrated active-matrix backplane of indium-gallium–zinc oxide thin-film transistors. Displays of $384\times384$ pixels built on a surface micromachining process on glass substrates have been demonstrated on both 6-in wafers and Gen 4.5 panels (730 mm $\times920$ mm) showing good yield and uniformity. [2016-0206] [ABSTRACT FROM PUBLISHER]