Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

MLA

Liujiang, Yu, et al. “Micromachining of Large Area Amorphous Carbon Membranes Prepared by Filtered Cathodic Vacuum Arc Technique.” Applied Surface Science, vol. 223, no. 4, Feb. 2004, p. 286. EBSCOhost, https://doi.org/10.1016/j.apsusc.2003.07.001.

APA

Liujiang, Y., Tay, B. K., Sheeja, D., Fu, Y. Q., & Miao, J. M. (2004). Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique. Applied Surface Science, 223(4), 286. https://doi.org/10.1016/j.apsusc.2003.07.001

Chicago

Liujiang, Yu, B.K. Tay, D. Sheeja, Y.Q. Fu, and J.M. Miao. 2004. “Micromachining of Large Area Amorphous Carbon Membranes Prepared by Filtered Cathodic Vacuum Arc Technique.” Applied Surface Science 223 (4): 286. doi:10.1016/j.apsusc.2003.07.001.