Cite
Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement.
MLA
Yasutake, M., et al. “Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement.” AIP Conference Proceedings, vol. 696, no. 1, Dec. 2003, pp. 256–63. EBSCOhost, https://doi.org/10.1063/1.1639704.
APA
Yasutake, M., Kaito, T., & Wakiyama, S. (2003). Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement. AIP Conference Proceedings, 696(1), 256–263. https://doi.org/10.1063/1.1639704
Chicago
Yasutake, M., T. Kaito, and S. Wakiyama. 2003. “Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement.” AIP Conference Proceedings 696 (1): 256–63. doi:10.1063/1.1639704.