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Direct inversion of interfacial reflectivity data using the Patterson function.
- Source :
-
Journal of Applied Crystallography . Dec2003, Vol. 36 Issue 6, p1352-1355. 4p. - Publication Year :
- 2003
-
Abstract
- Shows that the interfacial profile between two bonded wafers can be directly determined using X-ray reflectivity without resorting to standard model-fitting of the data. Attempt to solve the phase problem inherent to any structure determination by scattering technique; Use of a known silicon/silicon oxide interface which acts as a phase reference for the reflected signals.
Details
- Language :
- English
- ISSN :
- 00218898
- Volume :
- 36
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Crystallography
- Publication Type :
- Academic Journal
- Accession number :
- 11702630
- Full Text :
- https://doi.org/10.1107/S0021889803016649