Evolution of Nanodot Morphology on Polycarbonate (PC) Surfaces by 40 keV Ar+.

In the present paper we have discussed the effect of 40 keV Ar+ ions irradiation on nanoscale surface morphology of Polycarbonate (PC) substrate. Specimens were sputtered at off normal incidences of 300, 400 and 500 with the fluence of 1×1016 Ar+cm-2. The topographical behaviour of specimens was studied by using Atomic Force Microscopy (AFM) technique. AFM study demonstrates the evolution of nano dot morphology on PC specimens on irradiating with1×1016 Ar+cm-2. Average size of dots varied from 37-95 nm in this specified range of incidence while density of dots varied from 0.17- 3.0 x 107 dotscm-2. Such variations in morphological features have been supported by estimation of ion range and sputtering yield through SRIM simulations. [ABSTRACT FROM AUTHOR]