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Solution-processed conformal coating of ferroelectric polymer film and its application to multi-bit memory device.

Authors :
Kim, Woo Young
Shim, Hyun Bin
Jeon, Gwang-Jae
Kang, In-Ku
Lee, Hee Chul
Source :
Microelectronic Engineering. Jul2016, Vol. 160, p68-72. 5p.
Publication Year :
2016

Abstract

Ferroelectric multi-bit storage memory which is fabricated by means of the patterning and double-coating of ferroelectric polymer film is demonstrated. The multi-bit memory device demonstrated here has two thicknesses in a capacitor. Therefore, ferroelectric switching at each thickness arises in different voltage range. The structured capacitor with two different thicknesses is realized by optimizing two processes, i.e., the photo-lithographical patterning of the ferroelectric film and a double-coating method for the formation of the multilayer structure. Not only photo-lithographical patterning but also the double-coating method of ferroelectric film was performed with a solubility-controlled ferroelectric polymer solution created by the addition of an insoluble solvent. From electrostatic force microscopy and displacement-voltage measurements, the fabricated multi-bit storage memory operated as predicted for a multi-bit memory scheme. The solubility-controlling method suggested here will offer additional promising routes to fabricate complex organic devices based on a solution process. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
01679317
Volume :
160
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
114674271
Full Text :
https://doi.org/10.1016/j.mee.2016.03.037