Single-/multi-mode tunable lasers using MEMS mirror and grating

The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided. [Copyright &y& Elsevier]