Chemical vapor deposition of Si/SiC nano-multilayer thin films.

MLA

Weber, A., et al. “Chemical Vapor Deposition of Si/SiC Nano-Multilayer Thin Films.” Thin Solid Films, vol. 593, Oct. 2015, pp. 44–52. EBSCOhost, https://doi.org/10.1016/j.tsf.2015.08.042.

APA

Weber, A., Remfort, R., Woehrl, N., Assenmacher, W., & Schulz, S. (2015). Chemical vapor deposition of Si/SiC nano-multilayer thin films. Thin Solid Films, 593, 44–52. https://doi.org/10.1016/j.tsf.2015.08.042

Chicago

Weber, A., R. Remfort, N. Woehrl, W. Assenmacher, and S. Schulz. 2015. “Chemical Vapor Deposition of Si/SiC Nano-Multilayer Thin Films.” Thin Solid Films 593 (October): 44–52. doi:10.1016/j.tsf.2015.08.042.