Reliability test of a RF MEMS varactor based on a double actuation mechanism.

This paper presents the design and reliability tests of a novel micro-electro mechanical varactor based on a double actuation mechanism allowing for overall capacitive ratio C r of 5.2 and continuous capacitive ratio C r ⁎ of 2.6. The device has been modeled in ANSYS® multiphysics environment and manufactured by using the 8-masks FBK-irst RF MEMS process. The performance was tested on 10 samples showing good mechanical reproducibility and negligible capacitance ratios variation (C r = 5.2 ± 5%, C r ⁎ = 2.6 ± 4%). Self-biasing tests have been performed by applying an equivalent V rms on the RF central conductor, showing an insignificant capacitance ratio variation up to 13.5 V rms . Finally, cycling test was performed on the DUT up to 10 8 cycles, showing negligible variation of the capacitance. [ABSTRACT FROM AUTHOR]