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Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry.

Authors :
Wang, Xiao-Dong
Chen, Bo
Wang, Hai-Feng
Chen, Bin
Liu, Shi-Jie
Cui, Zhong-Xu
Li, Bo
Wang, Jun-Bo
Wang, Shan-Meng
Li, Yun-Peng
Source :
Journal of Applied Crystallography. Aug2015, Vol. 48 Issue 4, p1011-1015. 5p.
Publication Year :
2015

Abstract

Amorphous germanium (a-Ge) films in the thickness range of 5.2-370.7 nm were prepared by radio frequency magnetron sputtering. Spectroscopic ellipsometry analysis shows that less than 3% of medium-range order exists in a-Ge under the reported deposition conditions. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00218898
Volume :
48
Issue :
4
Database :
Academic Search Index
Journal :
Journal of Applied Crystallography
Publication Type :
Academic Journal
Accession number :
108632482
Full Text :
https://doi.org/10.1107/S1600576715009619