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Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry.
- Source :
-
Journal of Applied Crystallography . Aug2015, Vol. 48 Issue 4, p1011-1015. 5p. - Publication Year :
- 2015
-
Abstract
- Amorphous germanium (a-Ge) films in the thickness range of 5.2-370.7 nm were prepared by radio frequency magnetron sputtering. Spectroscopic ellipsometry analysis shows that less than 3% of medium-range order exists in a-Ge under the reported deposition conditions. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218898
- Volume :
- 48
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Crystallography
- Publication Type :
- Academic Journal
- Accession number :
- 108632482
- Full Text :
- https://doi.org/10.1107/S1600576715009619