Prevention of tapering in the tube-shaped sputtering target via initial heat treatment under external pressure.

MLA

Lee, Jong-Rak, et al. “Prevention of Tapering in the Tube-Shaped Sputtering Target via Initial Heat Treatment under External Pressure.” Ceramics International, vol. 41, no. 3, Part A, Apr. 2015, pp. 3677–83. EBSCOhost, https://doi.org/10.1016/j.ceramint.2014.11.038.

APA

Lee, J.-R., Chung, T.-J., Yang, S.-H., Hong, G.-S., & Oh, K.-S. (2015). Prevention of tapering in the tube-shaped sputtering target via initial heat treatment under external pressure. Ceramics International, 41(3, Part A), 3677–3683. https://doi.org/10.1016/j.ceramint.2014.11.038

Chicago

Lee, Jong-Rak, Tai-Joo Chung, Seung-Ho Yang, Gil-Su Hong, and Kyung-Sik Oh. 2015. “Prevention of Tapering in the Tube-Shaped Sputtering Target via Initial Heat Treatment under External Pressure.” Ceramics International 41 (3, Part A): 3677–83. doi:10.1016/j.ceramint.2014.11.038.