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Proton beam writing of low-loss polymer optical waveguides.
- Source :
-
Applied Physics Letters . 9/1/2003, Vol. 83 Issue 9, p1707. 3p. 2 Diagrams, 1 Chart, 1 Graph. - Publication Year :
- 2003
-
Abstract
- Proton beam writing is a direct-write micromachining technique capable of producing three-dimensional microstructures with straight and smooth sidewalls. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist, were fabricated using a focused submicron beam of 2.0 MeV protons with a dose of 30 nC/mm[sup 2] and a beam current of approximately 2 pA. Propagation losses of approximately (0.19±0.03) dB/cm were measured at 632.8 nm wavelength. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits. © 2003 American Institute of Physics. [ABSTRACT FROM AUTHOR]
- Subjects :
- *PROTON beams
*OPTICAL waveguides
*MICROSTRUCTURE
*MICROMACHINING
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 83
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 10665047
- Full Text :
- https://doi.org/10.1063/1.1606502