Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon.

MLA

Ahn, Chae Hyuck, et al. “Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon.” Journal of Microelectromechanical Systems, vol. 24, no. 2, Apr. 2015, pp. 343–50. EBSCOhost, https://doi.org/10.1109/JMEMS.2014.2330590.

APA

Ahn, C. H., Ng, E. J., Hong, V. A., Yang, Y., Lee, B. J., Flader, I., & Kenny, T. W. (2015). Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon. Journal of Microelectromechanical Systems, 24(2), 343–350. https://doi.org/10.1109/JMEMS.2014.2330590

Chicago

Ahn, Chae Hyuck, Eldwin J. Ng, Vu A. Hong, Yushi Yang, Brian J. Lee, Ian Flader, and Thomas W. Kenny. 2015. “Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon.” Journal of Microelectromechanical Systems 24 (2): 343–50. doi:10.1109/JMEMS.2014.2330590.