Back to Search
Start Over
Electrostatic-Pneumatic Membrane Mirror With Positive or Negative Variable Optical Power.
- Source :
-
Journal of Microelectromechanical Systems . Jun2015, Vol. 24 Issue 3, p716-729. 14p. - Publication Year :
- 2015
-
Abstract
- A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20- $\mu $ m total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented. [2014-0135] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 24
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 103129461
- Full Text :
- https://doi.org/10.1109/JMEMS.2014.2346758