Symmetric and Compact Single-Pole Multiple-Throw (SP7T, SP11T) RF MEMS Switches.

This paper presents extremely compact single-pole multiple-throw radio frequency (RF) microelectromechanical system switches, SP7T and SP11T, based on a symmetric circular switch topology. The switch dimensions are 0.61~mm\times 0.61 mm, which is smaller than typical CMOS Si-on-insulator switches. The SP7T and SP11T switches, which are insensitive to stress gradient effects, achieve simulated contact and restoring forces of 0.3–0.4 mN (per a switch) at 90–100 V. The SP7T and SP11T switches also achieve isolation levels of 50–19 dB and 50–17 dB, respectively, and insertion loss of 0.3–1.2 dB and 0.3–1.7 dB, respectively, at 0.1–10 GHz. The measured on-resistance is 4.5–2.5 $\Omega $ at 75–100 V, respectively, in an open environment and limited by contact contamination. The measured switching time is 7–10 \mu $ s. Cold-switched reliability tests of SP7T and SP11T switches show greater than 10^{8} Hz with an RF power of 0.1–1 W, which is sufficient power handling capability for 3G and 4G systems. [2014-0001] [ABSTRACT FROM AUTHOR]