1. High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators.
- Author
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Zhang, Chang, Yalavarthi, Eeswar K., Giroux, Mathieu, Cui, Wei, Stephan, Michel, Maleki, Ali, Weck, Arnaud, Ménard, Jean-Michel, and St-Gelais, Raphael
- Subjects
SUBMILLIMETER waves ,PYROELECTRIC detectors ,FREQUENCY stability ,RESONATORS ,RADIATION - Abstract
We achieve high detectivity terahertz radiation sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a balance between the frequency stability of the resonator and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity D * ≈ 3.4 × 1 0 9 c m ⋅ H z / W and a noise equivalent power N E P ≈ 36 p W / H z that outperform the best room-temperature on-chip THz detectors, such as pyroelectric detectors, while maintaining a comparable thermal response time of ≈ 200 ms. Our optical absorber consists of a 1-mm diameter metasurface, which currently enables a 0.5–3 THz detection range but can easily be scaled to other frequencies in the THz and infrared ranges. In addition to demonstrating high-performance terahertz radiation sensing, our work unveils an important fundamental trade-off between frequency stability and responsivity in thermal-based nanomechanical radiation sensors. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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