1. Investigating a Micro Pirani Gauge for Multi-Function Sensing.
- Author
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Zhang, Ming and Llaser, Nicolas
- Abstract
In this paper, a unique micro Pirani gauge is investigated for multi-function sensing. The microgauge, implemented in a silicon-on-insulator technology, was designed as a suspended microbridge. In order to be able to sense both temperature and pressure with a single implemented device, a special design consideration was taken. Moreover, concerning the pressure measurement, instead of exploiting the Pirani gauge principle in its steady state as done in a conventional way, the transient response of the gauge is exploited. As a result, the pressure sensitive range is remarkably extended beyond the atmosphere. The design of the device, the setup of experiments, and the measured results are given. [ABSTRACT FROM PUBLISHER]
- Published
- 2016
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