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1. High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process.

2. High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

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