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The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz. [ABSTRACT FROM AUTHOR]

The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz.

• We propose a systematic frequency trimming process including stiffness modification and mass modification. • We apply FEM simulation to calculate the change of mode eigenfrequency and verify the trimming process. • We set up frequency trimming experiments on different MSRs with T-shape masses to demonstrate the effectiveness of this method. This paper presents a novel method to achieve permanent frequency trimming between wineglass modes of micro shell resonator (MSR) with T-shape masses (T-masses) using femtosecond laser ablation. Trimming effects on stiffness and mass distribution around the rim are analyzed by finite element method (FEM). Stiffness and mass trimming can be achieved by grooves ablating in different positions. A systematic frequency trimming process including stiffness and mass modification is proposed. FEM simulation is further applied to estimate the variation of cross coupling and frequency split during the trimming process. High resolution trimming without surface deterioration is achieved by using a low-power femtosecond laser. Finally, frequency trimming experiments were implemented on imperfect resonators. Test results show that frequency split can be effectively reduced to less than 0.5Hz within several steps, demonstrating the effectiveness of this method. [ABSTRACT FROM AUTHOR]

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (QTED) and anchor loss (Qanchor) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on QTED and Qanchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1−10% reduction of QTED, and the length of trimming groove is positively related to the reduction of QTED. The reduction of QTED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10−90% reduction of Qanchor. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs.

In this paper, the mechanical trimming process for hot stamped ultra-high strength parts was studied, in which the properties of fracture profile were analyzed and the effects of process parameters were evaluated. The research was carried out by FEM simulation with comparison and chosen of damage models, where the critical damage values were obtained through an iterative “predictor-corrector approach”. In addition, an experimental trimming tool was designed to study the effects of variable process parameters and verify the simulation results. By comparison, it was found that the Oyane damage model agreed with the experimental results better than others. The simulation and experimental results showed that the quality of trimmed hot stamped surface was poor with not straight profile and small burnish zone, but it can be improved by choosing proper trimming angle and blade radius. Such phenomena were discussed and explained in terms of stress state. Tensile stress accelerates the damage value while compress stress inhibits it. This paper helps to better understand the mechanical properties of hot stamped ultra-high strength steel. [ABSTRACT FROM AUTHOR]

Mechanical trimming process for ultra-high strength boron steel after hot stamping was carried out in this study. Shear and tensile tests were designed to analyze the influences of stress state on the fracture mode; trimmed fracture surface and profile were observed and compared to other commonly used steels such as DP980 and Q235 etc.; the crack propagation during trimming process was studied through step-by-step tests. The observation and analysis reveal that the fracture mode of hot-stamped boron steel is highly related to the stress state, it belongs to cleavage fracture on low stress triaxiality but dimple fracture on high stress triaxiality. Such phenomenon is reflected in the trimming process, during which the stress state changes from shear-dominated state to tensile-dominated state. In addition, the burnish zone of trimmed boron steel is much smaller than other high strength steels, and the profile of cutting surface shows an 'S'-like shape which is destructive to the trimming tool. Moreover, during the trimming process, most martensite laths near the cutting edge are stretched and rotated markedly to the direction of the shear band, and the main crack expands along those grain boundaries, which may penetrate through a few martensite laths and form small crack branches. [ABSTRACT FROM AUTHOR]

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping ( Q TED ) and anchor loss ( Q anchor ) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on Q TED and Q anchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1-10% reduction of Q TED , and the length of trimming groove is positively related to the reduction of Q TED . The reduction of Q TED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10-90% reduction of Q anchor . Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs., Competing Interests: The authors declare no conflict of interest.