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Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains., This research has received funding from the European Union H2020 FET Open Project PHENOMEN (No. 713450). The ICN2 authors acknowledge support by the Severo Ochoa program from Spanish MINECO (Grant No. SEV-2019-0706), the MCIN project SIP (PGC2018-101743-B-100), and by the CERCA Programme Generalitat de Catalunya. G.A. was supported by a BIST and MFC by a S. Ochoa Project Ph.D. studentships. G. M. acknowledges support from the EU ERC project LEIT (GA Nr. 885689). A.M. acknowledges support from MCIN/AEI/10.13039/501100011033/ (Projects PGC2018-094490-BC21 and ICTS-2017-28-UPV-9), from Generalitat Valenciana (BEST/2020/178, PROMETEO/2019/123, and IDIFEDER/2021/061) and from “Unión Europea NextGenerationEU/PRTR”.

Surface acoustic wave (SAW) is effective for the manipulation of fluids and particles in microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require the full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need of clean room facilities and alignment. The IDTs and microfluidic channels are fabricated in the same process and thus precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation.