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In this study, the conceptual design and performance of a multimodal X-ray probe station recently installed at the 9C coherent X-ray scattering beamline of the Pohang Light Source-II are presented. The purpose of this apparatus is to measure coherent X-ray diffraction, X-ray fluorescence and electrical properties simultaneously. A miniature vacuum probe station equipped with a four-point probe was mounted on a six-axis motion hexapod. This can be used to study the structural and chemical evolution of thin films or nanostructures, as well as device performance including electronic transport properties. This probe station also provides the capability of varying sample environments such as gas atmosphere using a mass-flow-control system and sample temperatures up to 600°C using a pyrolytic boron nitride heater. The in situ annealing of ZnO thin films and the performance of ZnO nanostructure-based X-ray photodetectors are discussed. These results demonstrate that a multimodal X-ray probe station can be used for performing in situ and operando experiments to investigate structural phase transitions involving electrical resistivity switching.

In this study, the conceptual design and performance of a multimodal X-ray probe station recently installed at the 9C coherent X-ray scattering beamline of the Pohang Light Source-II are presented. The purpose of this apparatus is to measure coherent X-ray diffraction, X-ray fluorescence and electrical properties simultaneously. A miniature vacuum probe station equipped with a four-point probe was mounted on a six-axis motion hexapod. This can be used to study the structural and chemical evolution of thin films or nanostructures, as well as device performance including electronic transport properties. This probe station also provides the capability of varying sample environments such as gas atmosphere using a mass-flow-control system and sample temperatures up to 600°C using a pyrolytic boron nitride heater. The in situ annealing of ZnO thin films and the performance of ZnO nanostructure-based X-ray photodetectors are discussed. These results demonstrate that a multimodal X-ray probe station can be used for performing in situ and operando experiments to investigate structural phase transitions involving electrical resistivity switching., (open access.)