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[Introduction] The "carbon peak and neutrality" strategy has put forward a new path for China's energy development, which restricts the use of traditional fossil energy, and promotes the Chinese government to increase its support for the development of the new energy industry. Photovoltaic, as a new energy which is the most accessible and has the widest coverage, has become the first choice to solve the current energy and environmental problems. However, if we want to increase its market scale and realize the vigorous development of photovoltaic industry, it is necessary to find out and solve the pain points and difficulties of the current stage. [Method] China's policy on the whole photovoltaic industry chain was combed and analyzed to explore the shortcomings of the photovoltaic industry incentive policy. Based on the data from 33 sample enterprises in the A-share market from 2000 to 2021, the DEA model was built and the integrated innovation benefits and scale benefits of China's PV industry under the guidance of policy were explored. And using the panel regression analysis method, the different impacts of different regional policies on the innovation capacity of the upstream, middle and downstream enterprises of the PV industry. were explored. [Result] The research shows that the policy subsidies have a more significant impact on the innovation benefits of upstream photovoltaic enterprises, which is positively correlated with the development of enterprises in the eastern region. While in the western region, the opposite is the case, and there are certain regional differences. [Conclusion] It is necessary to improve the preferential policy strength in the photovoltaic technology innovation level, and carry out a reasonable industry chain planning and layout in combination with the regional advantages.

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