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Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology with the following requirements: (R1) operation at a design wavelength of choice in the visible (VIS) to near-infrared (NIR) spectrum, (R2) a scalable technology with a high channel density (> 100mm-2 ), (R3) a high modulation speed (> 100MHz), and (R4) a high extinction ratio (> 20 dB). To fulfill these requirements, we introduce a modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200mm diameter silicon wafers with CMOS compatible processes. We present a proof-of-concept device with 4 x 4 individually addressable 50 {mu}m x 50 {mu}m pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100MHz modulation speeds, and a spectral response with > 20 dB extinction., Comment: 9 pages + 2 pages supplementary

A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world., Comment: 12 pages main text, 1 page methods, 10 pages supplementary information

Numerous applications in quantum and classical optics require scalable, high-speed modulators that cover visible-NIR wavelengths with low footprint, drive voltage (V) and power dissipation. A critical figure of merit for electro-optic (EO) modulators is the transmission change per voltage, dT/dV. Conventional approaches in wave-guided modulators seek to maximize dT/dV by the selection of a high EO coefficient or a longer light-material interaction, but are ultimately limited by nonlinear material properties and material losses, respectively. Optical and RF resonances can improve dT/dV, but introduce added challenges in terms of speed and spectral tuning, especially for high-Q photonic cavity resonances. Here, we introduce a cavity-based EO modulator to solve both trade-offs in a piezo-strained photonic crystal cavity. Our approach concentrates the displacement of a piezo-electric actuator of length L and a given piezoelectric coefficient into the PhCC, resulting in dT/dV proportional to L under fixed material loss. Secondly, we employ a material deformation that is programmable under a "read-write" protocol with a continuous, repeatable tuning range of 5 GHz and a maximum non-volatile excursion of 8 GHz. In telecom-band demonstrations, we measure a fundamental mode linewidth = 5.4 GHz, with voltage response 177 MHz/V corresponding to 40 GHz for voltage spanning -120 to 120 V, 3dB-modulation bandwidth of 3.2 MHz broadband DC-AC, and 142 MHz for resonant operation near 2.8 GHz operation, optical extinction down to min(log(T)) = -25 dB via Michelson-type interference, and an energy consumption down to 0.17 nW/GHz. The strain-enhancement methods presented here are applicable to study and control other strain-sensitive systems.

Atom-like defects or color centers (CC's) in nanostructured diamond are a leading platform for optically linked quantum technologies, with recent advances including memory-enhanced quantum communication, multi-node quantum networks, and spin-mediated generation of photonic cluster states. Scaling to practically useful applications motivates architectures meeting the following criteria: C1 individual optical addressing of spin qubits; C2 frequency tuning of CC spin-dependent optical transitions; C3 coherent spin control in CC ground states; C4 active photon routing; C5 scalable manufacturability; and C6 low on-chip power dissipation for cryogenic operations. However, no architecture meeting C1-C6 has thus far been demonstrated. Here, we introduce a hybrid quantum system-on-chip (HQ-SoC) architecture that simultaneously achieves C1-C6. Key to this advance is the realization of piezoelectric strain control of diamond waveguide-coupled tin vacancy centers to meet C2 and C3, with ultra-low power dissipation necessary for C6. The DC response of our device allows emitter transition tuning by over 20 GHz, while the large frequency range (exceeding 2 GHz) enables low-power AC control. We show acoustic manipulation of integrated tin vacancy spins and estimate single-phonon coupling rates over 1 kHz in the resolved sideband regime. Combined with high-speed optical routing with negligible static hold power, this HQ-SoC platform opens the path to scalable single-qubit control with optically mediated entangling gates.

Programmable photonic integrated circuits (PICs) are emerging as powerful tools for the precise manipulation of light, with applications in quantum information processing, optical range finding, and artificial intelligence. The leading architecture for programmable PICs is the mesh of Mach-Zehnder interferometers (MZIs) embedded with reconfigurable optical phase shifters. Low-power implementations of these PICs involve micromechanical structures driven capacitively or piezoelectrically but are limited in modulation bandwidth by mechanical resonances and high operating voltages. However, circuits designed to operate exclusively at these mechanical resonances would reduce the necessary driving voltage from resonantly enhanced modulation as well as maintaining high actuation speeds. Here we introduce a synchronous, micromechanically resonant design architecture for programmable PICs, which exploits micromechanical eigenmodes for modulation enhancement. This approach combines high-frequency mechanical resonances and optically broadband phase shifters to increase the modulation response on the order of the mechanical quality factor $Q_m$, thereby reducing the PIC's power consumption, voltage-loss product, and footprint. The architecture is useful for broadly applicable circuits such as optical phased arrays, $1$ x $N$, and $N$ x $N$ photonic switches. We report a proof-of-principle programmable 1 x 8 switch with piezoelectric phase shifters at specifically targeted mechanical eigenfrequencies, showing a full switching cycle of all eight channels spaced by approximately 11 ns and operating at >3x average modulation enhancement across all on-chip modulators. By further leveraging micromechanical devices with high $Q_m$, which can exceed 1 million, our design architecture should enable a new class of low-voltage and high-speed programmable PICs., Comment: 18 pages, 5 figures, 5 supplementary figures

A central goal in creating long-distance quantum networks and distributed quantum computing is the development of interconnected and individually controlled qubit nodes. Atom-like emitters in diamond have emerged as a leading system for optically networked quantum memories, motivating the development of visible-spectrum, multi-channel photonic integrated circuit (PIC) systems for scalable atom control. However, it has remained an open challenge to realize optical programmability with a qubit layer that can achieve high optical detection probability over many optical channels. Here, we address this problem by introducing a modular architecture of piezoelectrically-actuated atom-control PICs (APICs) and artificial atoms embedded in diamond nanostructures designed for high-efficiency free-space collection. The high-speed 4-channel APIC is based on a splitting tree mesh with triple-phase shifter Mach-Zehnder interferometers. This design simultaneously achieves optically broadband operation at visible wavelengths, high-fidelity switching ($> 40$ dB) at low voltages, sub-$\mu$s modulation timescales ($> 30$ MHz), and minimal channel-to-channel crosstalk for repeatable optical pulse carving. Via a reconfigurable free-space interconnect, we use the APIC to address single silicon vacancy color centers in individual diamond waveguides with inverse tapered couplers, achieving efficient single photon detection probabilities (15$\%$) and second-order autocorrelation measurements $g^{(2)}(0) < 0.14$ for all channels. The modularity of this distributed APIC - quantum memory system simplifies the quantum control problem, potentially enabling further scaling to 1000s of channels.

Advances in laser technology have driven discoveries in atomic, molecular, and optical (AMO) physics and emerging applications, from quantum computers with cold atoms or ions, to quantum networks with solid-state color centers. This progress is motivating the development of a new generation of "programmable optical control" systems, characterized by criteria (C1) visible (VIS) and near-infrared (IR) wavelength operation, (C2) large channel counts extensible beyond 1000s of individually addressable atoms, (C3) high intensity modulation extinction and (C4) repeatability compatible with low gate errors, and (C5) fast switching times. Here, we address these challenges by introducing an atom control architecture based on VIS-IR photonic integrated circuit (PIC) technology. Based on a complementary metal-oxide-semiconductor (CMOS) fabrication process, this Atom-control PIC (APIC) technology meets the system requirements (C1)-(C5). As a proof of concept, we demonstrate a 16-channel silicon nitride based APIC with (5.8$\pm$0.4) ns response times and -30 dB extinction ratio at a wavelength of 780 nm. This work demonstrates the suitability of PIC technology for quantum control, opening a path towards scalable quantum information processing based on optically-programmable atomic systems.

A central goal in many quantum information processing applications is a network of quantum memories that can be entangled with each other while being individually controlled and measured with high fidelity. This goal has motivated the development of programmable photonic integrated circuits (PICs) with integrated spin quantum memories using diamond color center spin-photon interfaces. However, this approach introduces a challenge in the microwave control of individual spins within closely packed registers. Here, we present a quantum-memory-integrated photonics platform capable of (i) the integration of multiple diamond color center spins into a cryogenically compatible, high-speed programmable PIC platform; (ii) selective manipulation of individual spin qubits addressed via tunable magnetic field gradients; and (iii) simultaneous control of multiple qubits using numerically optimized microwave pulse shaping. The combination of localized optical control, enabled by the PIC platform, together with selective spin manipulation opens the path to scalable quantum networks on intra-chip and inter-chip platforms., Comment: 10 pages, 4 figures

Large-scale generation of quantum entanglement between individually controllable qubits is at the core of quantum computing, communications, and sensing. Modular architectures of remotely-connected quantum technologies have been proposed for a variety of physical qubits, with demonstrations reported in atomic and all-photonic systems. However, an open challenge in these architectures lies in constructing high-speed and high-fidelity reconfigurable photonic networks for optically-heralded entanglement among target qubits. Here we introduce a programmable photonic integrated circuit (PIC), realized in a piezo-actuated silicon nitride (SiN)-in-oxide CMOS-compatible process, that implements an N x N Mach-Zehnder mesh (MZM) capable of high-speed execution of linear optical transformations. The visible-spectrum photonic integrated mesh is programmed to generate optical connectivity on up to N = 8 inputs for a range of optically-heralded entanglement protocols. In particular, we experimentally demonstrated optical connections between 16 independent pairwise mode couplings through the MZM, with optical transformation fidelities averaging 0.991 +/- 0.0063. The PIC's reconfigurable optical connectivity suffices for the production of 8-qubit resource states as building blocks of larger topological cluster states for quantum computing. Our programmable PIC platform enables the fast and scalable optical switching technology necessary for network-based quantum information processors., Comment: 21 pages, 4 figures, 6 supplementary figures

Visible-wavelength very large-scale integration (VLSI) photonic circuits have potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V$_{\pi}$-cm in differential operation, -1.5 dB to -2 dB insertion loss, and up to 40 dB contrast in the 700 nm - 780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 MHz and 6.8 MHz respectively, which through resonant enhancement of Q~40, further decreases the operating voltage down to 0.15 V$_{\pi}$-cm., Comment: 13 pages, 6 figures, 3 supplementary figures

Recent advances in photonic integrated circuits (PICs) have enabled a new generation of "programmable many-mode interferometers" (PMMIs) realized by cascaded Mach Zehnder Interferometers (MZIs) capable of universal linear-optical transformations on N input-output optical modes. PMMIs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, PMMI implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here, we introduce a large-scale PMMI platform, based on a 200 mm CMOS process, that uses aluminum nitride (AlN) piezo-optomechanical actuators coupled to silicon nitride (SiN) waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible to near-infrared wavelengths. Moreover, the vanishingly low holding-power consumption of the piezo-actuators enables these PICs to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications., Comment: 18 pages, 5 figures, 7 supplementary figures