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As the demand for video streaming has been rapidly increasing recently, new technologies for improving the efficiency of video streaming have attracted much attention. In this paper, we thus investigate how to improve the efficiency of video streaming by using clients’ cache storage considering exclusive OR (XOR) coding-based video streaming where multiple different video contents can be simultaneously transmitted in one transmission as long as prerequisite conditions are satisfied, and the efficiency of video streaming can be thus significantly enhanced. We also propose a new cache update scheme using reinforcement learning. The proposed scheme uses a K-actor-critic (K-AC) network that can mitigate the disadvantage of actor-critic networks by yielding K candidate outputs and by selecting the final output with the highest value out of the K candidates. The K-AC exists in each client, and each client can train it by using only locally available information without any feedback or signaling so that the proposed cache update scheme is a completely decentralized scheme. The performance of the proposed cache update scheme was analyzed in terms of the average number of transmissions for XOR coding-based video streaming and was compared to that of conventional cache update schemes. Our numerical results show that the proposed cache update scheme can reduce the number of transmissions up to 24% when the number of videos is 100, the number of clients is 50, and the cache size is 5.

The need for drone traffic control management has emerged as the demand for drones increased. Particularly, in order to control unauthorized drones, the systems to detect and track drones have to be developed. In this paper, we propose the drone position tracking system using multiple Bluetooth low energy (BLE) receivers. The proposed system first estimates the target’s location, which consists of the distance and angle, while using the received signal strength indication (RSSI) signals at four BLE receivers and gradually tracks the target based on the estimated distance and angle. We propose two tracking algorithms, depending on the estimation method and also apply the memory process, improving the tracking performance by using stored previous movement information. We evaluate the proposed system’s performance in terms of the average number of movements that are required to track and the tracking success rate.

The NTR system is the major regulator of nitrogen metabolism in Bacteria. Despite its broad and well-known role in the assimilation, biosynthesis and recycling of nitrogenous molecules, little is known about its role in carbon metabolism. In this work, we present a new facet of the NTR system in the control of NADPH concentration and the biosynthesis of molecules dependent on reduced coenzyme in Herbaspirillum seropedicae SmR1. We demonstrated that a ntrC mutant strain accumulated high levels of polyhydroxybutyrate (PHB), reaching levels up to 2-fold higher than the parental strain. In the absence of NtrC, the activity of glucose-6-phosphate dehydrogenase (encoded by zwf) increased by 2.8-fold, consequently leading to a 2.1-fold increase in the NADPH/NADP

In a conventional daylight-responsive dimming system (DRDS), all the luminaires are turned off during the calibration process except for the luminaire under consideration in order to sense only the workplane illuminance of that luminaire. However, the workplane illuminance of the luminaire is influenced by other luminaires. Therefore, the final workplane illuminance of the actual operated system is higher than the target workplane illuminance, reducing the energy-saving efficiency of the DRDS. Herein, to improve the conventional DRDS, an advanced commissioning prediction method of daylight illuminance, and a dimming control algorithm considering the influences by distant luminaires are proposed. To evaluate the accuracy of the proposed prediction method of daylight illuminance, the daylight illuminance on the workplane and the photo sensor values of six points were measured in a full-scale mockup for 27 consecutive days from 22 June to 18 July 2018. As a result of root-mean-square error (RMSE) analysis of daylight illuminance and the photo sensor values, the RMSE (64.86) of P3 located in the middle of the room was the highest, and the RMSE value (17.60) of P5 located near the window was the lowest. In addition, the power consumption of the luminaires, and the target illuminance accuracy of the proposed DRDS were measured and analyzed for 32 consecutive days from 19 July to 19 August 2018 in a full-scale mockup. The average target illuminance accuracy was 96.9% (SD 2.2%), the average lighting energy-savings ratio was 78.4%, and the daylight illuminance prediction accuracy was 95.5% (SD 3.4%).

LSGM8282 (La0.8Sr0.2Ga0.8Mg0.2O3−δ) material as the solid electrolyte for intermediate temperature solid oxide fuel cells was synthesized by solid-state reaction. LSGM material with single phase was obtained by optimizing calcination and sintering temperatures. LSGM electrolyte layer, buffer layer (LDC) and anode layers (NiO/GDC) and its assembly were fabricated by the tape-casting and co-sintering process. Power density, impedance and durability of SOFC single cell were evaluated at intermediate-temperatures. As the result, LSGM showed high ionic conductivity of 0.16 S cm−1 at 800 °C. The single cell showed good power density of 1.24 W cm−2 at 2 A cm−2, ohmic resistance of 0.07 Ω cm2 at 800 °C and durability of 500 h.

Needleman-Wunsch dynamic programming algorithm measures the similarity of the pairwise sequence and finds the optimal pair given the number of sequences. The task becomes nontrivial as the number of sequences to compare or the length of sequences increases. This research aims to parallelize the computation involved in the algorithm to speed up the performance using CUDA. However, there is a data dependency issue due to the property of a dynamic programming algorithm. As a solution, this research introduces the heterogeneous anti-diagonal approach, which benefits from the interaction between the serial implementation on CPU and the parallel implementation on GPU. We then measure and compare the computation time between the proposed approach and a straightforward serial approach that uses CPU only. Measurements of computation times are performed under the same experimental setup and using various pairwise sequences at different lengths. The experiment showed that the proposed approach outperforms the serial method in terms of computation time by approximately three times. Moreover, the computation time of the proposed heterogeneous anti-diagonal approach increases gradually despite the big increments in sequence length, whereas the computation time of the serial approach grows rapidly.

Solid oxide fuel cell (SOFC) is attracting more attention in recent years for its lower pollution emission and high energy convert efficiency. The SOFC is conventionally operated at high temperatures between 900 and 1000 °C, because of the low ionic conductivity of YSZ below 800 °C. ScSZ-based electrolyte is one of the candidate materials for IT-SOFCs because of their higher ionic conductivities compared to any other zirconia electrolytes. In general, it is reported that 1Ce10ScSZ composition is available as ScSZ-based electrolyte of SOFC [1]. In this paper, CeScSZ powders with ceria-doped content were synthesized by co-precipitation process. The crystal lattice parameter and XRD peak pattern of powders were investigated with the increase of calcination temperature and the change of ceria-doped content at a certain calcination temperature. Ionic conductivities of the CeScSZ powders were also studied at the range of 500 ~ 900 °C. In here, the XRD peaks of cubic structure were found only on the ceria-doped powders more than 1 mole% even at the calcination temperature of 1500 °C. Meanwhile, the behaviour of ionic conductivities showed little different characteristics from the XRD pattern, namely, 1 mole% ceria-doped 10ScSZ powder showed the highest conductivity. Therefore, electrolyte film was fabricated by using the synthesized 1Ce10ScSZ powder and single cell of SOFC with anode-supported electrolyte was fabricated by tape casting and co-sintering process. As a result, the SOFC cell showed power density of 1.2 W/cm2 at 2 A/cm2, 800 °C with low ohmic resistance of under 0.1 W·cm2. References [1] Ju Hee Kang, Young Mi Kim, Ho-Sung Kim, Moo Sung Lee, Jae Hyuk Jang, Jin-Hun Jo “Fabrication characteristics of SOFC single cell using nanocrystalline 1Ce10ScSZ electrolyte powder prepared by co-precipitation process,” J. Full Cell and Technology, 2012, Vol 9, pp. 011015.

HVDC transformers are one of the main components for long distance transmission, for which many investigations have been done all over the world in order to increase their efficiency and reliability. Regarding their insulation, oil immersed pressboards are widely used, representing one of the most important elements playing a role in transformer behaviors. Under DC operation, space charges accumulating between the oil and pressboard have been reported as the influential cause possibly giving rise to unexpected service failures under the transient voltage from the grid. However, it might be possible to presume that the accumulation of space charge could be facilitated inside the multilayered pressboard causing insulation breakdown in a different way. In addition, other parameters could be potential issues to investigate: non homogeneous temperature distribution along the oil circulation path and the DC field intensity. The former could explain the conductivity variation causing the non-uniform DC field distribution, while the latter plays a role in the variation of conductivity. With these in mind, three parameters have mainly been put under experimental investigation. For this purpose, a DC voltage is applied to the oil immersed pressboard, and then the polarization and leakage current are measured and analyzed. The mobility of the space charge is calculated from the former as a function of the number of layers, while the conductivity is obtained from the latter.

Car running data collected from the vehicle is a native image data and sensing data of it. Hence, it can be used as a set of objective data based on which events that took place outside the car can be analyzed and determined. In this paper, we designed and implemented a emergency situation detection system to sense, store, and analyze signals related to car movements, driver`s various operation states, collision pulse, etc when a car collision accident occurs on the actual road by sensing and analyzing the car movements and driver`s operation status. The suggested system provides information on the driver`s reaction right before the collision, operation state of the vehicle, and physical movement. The collected and analyzed data on vehicle running can be utilized to clarify the cause of a collision accident and to handle it in a just manner. Besides, it can contribute to grasping and correcting wrong driving habits of the driver and to saving.

Several technological problems have to be resolved for LED to be used as a general purpose light source. For instance, LED luminaires have a property of high luminance due to a narrow beam angle and a small volume compared to general light sources. There are several differences between existing luminaires and the intensity distribution of an LED luminaire. An optical engineer has the challenging problem of designing a spatially extended and non-uniform light source. It is difficult for LED luminaires to obtain the target luminous intensity distribution required in a space, because the design process requires much trial and error. And the process also requires much design time. In this study, an optimization algorithm of a numerical model for luminous intensity distribution of planar LED luminaires was developed to find optimized prism angles. This algorithm would used the micro genetic algorithm technique which is the improved form of genetic algorithms. Also, this algorithm is capable of deriving the optimized angle of a prism to achieve the target luminous intensity distribution of planar prism LED luminaires. Therefore, the purpose of this study is to introduce a numerical model of a planar prism LED luminaire and to develop a optimization algorithm that is able to find an optimum luminaire optical design solution using the micro genetic algorithm.

This paper propose the method to recognize the lanes and distance between cars in real-time which detects dangerous situations and helps safe driving in the actual road environment. First of all, it extracts the area of interest corresponding to roads and cars from the road image photographed by using the forward-looking camera. Through the hough transform for the area of interest, this study detects linear components and also selects the lane and conducts filtering by calculating probability. And through the shadow threshold analysis of the cars in front within the area of interest, it extracts the objects of cars in front and calculates the distance from cars in front. According to the result of applying the suggested technology to recognize the lane and distance between cars to the road situation for testing, it showed over 95% recognition rate; thus, it has been proved that it can respond to safe driving.

LED lighting is often presented as the lighting technology of the future. Yet there are differences in the luminous intensity distributions between luminaires that employ conventional light sources and those that employ LEDs. The optical engineer faces a new challenge of designing for a spatially extended and nonuniform light source. Consequently, a new approach is needed for the optical design of planar LED luminaires. Luminaire optical design is typically performed using a combination of ray-tracing and trial-and-error experimentation with the goal of obtaining a target luminous intensity distribution. The number of iterations can be reduced by utilizing optimization algorithms. This study aimed to develop a numerical model for luminous intensity distribution of planar prism LED luminaires and apply the optimization algorithm for prism angle design. A calculation process for the prism optical design of a planar prism LED luminaire was developed. To assess the accuracy of the numerical model, a c...

There are several technological problems have to be resolved for LEDs to be used as a general purpose light source. In addition, there are several differences between existing luminaires and the general planer LED luminaire for the intensity distribution. Therefore, the optical engineer then faces the challenging a problem of designing for a spatially extended and non-uniform light source. In the previous studies on the optical design of luminaires, a lot of studies on reflectors and light source have been conducted but the ones on prisms and lenses are insufficient at present. This study developed the numerical model of planar prism LED luminaire to control luminous intensity distribution of LED luminaires. And this study presents an optical calculation process for the prism optical design of a planar prism LED luminaire and a comparison of the simulation results between the developed numerical model and Photopia 2.0 to verify the accuracy of the numerical model. In addition, this study showed a method for the control of various luminous intensity distribution from the developed numerical model.

LED lighting may cause different sensation and color appearance due to the different spectral power distributions compared to those of conventional lightings. Particularly, the CCT (Correlated Color Temperature) of LED lighting has a major effect on color appearance so that this study conducted an experiment through a subjective evaluation and luminance measurement for effective color appearance in a space. This study performed a subjective evaluation under the seven different LED CCT conditions, and color appearance was evaluated with major five colors in a customized lighting box. In addition, luminance measurement was conducted for each CCT and color condition to compare the results from a subjective evaluation. The results of this study may help to select a proper LED CCT for specific color conditions.

Development of high efficiency and eco-friendly LED source has been progressed continuously. Also, by nation`s regulations, public institutions have changed existing luminaires to LED luminaires. However, there are several differences between existing luminaires and the intensity distribution of general planar LED luminaires. In case of changing existing luminaires to LED luminaires, by such differences, there are inefficiencies both quality aspect and energy aspect in luminous environment. Therefore, this study aims to conduct a study on the changes of intensity distribution and luminous environment by reflector shapes in indirect reflected LED luminaires with software for optical design of a luminaire (Photopia 2.0) and lighting design of a space (ReluxPro). This study shows the changes of intensity distribution and luminous environment of indirect reflected LED luminaires and indirect fluorescent lamp luminaires by reflector shapes.

Recently, adjustable CCT(Correlated Color Temperature) luminaire for the human circadian rhythm and room atmosphere has been developed. Accurate CCT control is needed in the luminaire for the human circadian rhythm. Therefore, appropriate CCT calculation method for each of fluorescent lamps and white LEDs was examined using three CCT calculation methods in this study. To make accurate CCT combination, CCT for two different CCT lamps was separately measured. And this study compared and analyzed proportionally calculated CCT value with measured value from the compounded luminaire with the two lamps.

This study aims to evaluate the accuracy and energy savings of a daylight responsive dimming system (DRDS) when considering the influence of indirect illuminance. In the case of the existing DRDS, during the calibration process of each luminaire, the other luminaires were turned off to detect the illuminance of both the luminaire and the incoming daylight. However, the work plane illuminance under the luminaires was affected by the indirect illuminance from the other luminaires. The final work plane illuminance would thus be higher than the target illuminance during real system operation. To improve the accuracy and energy savings of the DRDS, an improved dimming control algorithm was applied to the DRDS when considering the influence of indirect illuminance. The real-time power consumption and accuracy of the target illuminance of the DRDS when considering the influence of indirect illuminance in a full-scale mock-up was measured and analyzed (for 23 days, from 22 June to 18 July 2018). As a result, the average accuracy of the target illuminance was 98.9% (SD 0.5%), and the average saving in lighting energy was 77%.

Until now, dimmable fluorescent luminaires has been widely used for dimming systems, and LED is currently attracting attentions as a alternative lamp due to environmental problem issues. LED, one of eco-friendly high efficiency lamp, has advantage that dimming is easy than fluorescent luminaire. But there have been not enough research on technical development and application for LED dimming. Therefore, to analyze luminous quantity of dimmable LED, the illuminance, color temperature, luminance, and current were measured in the whole range of dimming. In the results of this study, the dimmable LED of various types showed a similar trend in the changed luminous quantity by dimming.

The luminous environment in a space is one of the key factors affecting the occupants' work performance and mood. An illuminance value is quantitatively standardised and recommended for a specific space, but correlated colour temperature (CCT) is not. Although some studies on CCT conditions have shown that higher CCT conditions appear brighter to people than lower CCT conditions, other studies have indicated that there is no relationship between brightness perception and CCT conditions. This paper reports the results of two subjective evaluations of different CCTs on personal preferences: brightness perception, subjective impression and work performance; and describes suitable CCT conditions for a specific space and activities. One subjective evaluation (field test) was performed with four different CCT fluorescent lamps in an office space, and another (photo-image test) was performed with pictures under four different CCT conditions in an office, living room and bedroom. The results were statistically analysed for gender, preferred CCT, suitable CCT of each space and brightness sensitivity. The results showed that people preferred different CCT due to the purpose of a space, and different CCT conditions for specific activities performed in that space. The study suggests that changeable CCT lightings are better than fixed CCT for occupants in a space.

Available daylight in inside offers comfortable view environment, and psychological and physical advantages to people in a room. Architectural design has a need for daylight prediction. But it is difficult to predict the illuminance values in daylight system. Using various Daylight simulation software is easy and simple, but we can find different results under the same conditions. This study compares with illuminance values from simulation (Lightscape 3.2, Relux 2007, Radiance 3.9) and Mock-up experiment with a same space and parameter of daylight (location of space and window, date, time and sky condition).

Sky cover method can be used to determine sky condition by cloud amount of the Korea Meteorological Administration. And, HCI (Hourly Clearness Index) method is another method determined by measured horizontal global radiation data. The results of the HCI methods of Erbs et al. (1982), Orgill and Hollands (1977) seem to be not good enough because of the air pollution such as smog phenomenon or yellow sand phenomenon and so on. Therefore, HCI should be corrected. The aim of this study is to improve HCI. Therefore, this study is to analyze and compare on the sky conditions from Sky cover method and HCI, and then presents hourly correction factor based on Sky 채팩 method. The results of corrected HCI improved.

Contemporary office buildings are frequently designed with curtain wall systems that inevitably allow enormous amounts of direct sunlight. This fact has several negative effects on the work environment and as a result, from an energy usage point of view, most of today's curtain wall buildings use certain shading devices to keep a comfortable work environment. Among many shading devices, perforated aluminum panels have often been used as an esthetical respond to popular High-tech and Neo Modern style architecture since the early 1980's but their functional effectiveness has been not seriously examined. This study compared luminous environments in office buildings with illuminance and luminance values between several perforated panels and fabric roller shades, which are the most widely used shading devices. This study creates a new functional standard for perforated panels and demonstrates their value not only in style but also as a reliable shading device.

Daylight responsive dimming systems are one of lighting control systems which are to control artificial lightings using available daylight for energy savings. This system is not popular because useful daylight is usually blocked by uncontrolled passive shading systems in buildings. It is necessary to integrate daylight responsive dimming systems and automata! roller shading systems. In this research, mock-up test is performed to analyze the daylight distributions in three different rooms for integrated systems. Roller shades are installed in two rooms. One is fully downed and the other is controlled by sun profile angle. The other room has no shading system as a reference room.

The aim of this study is to analyze the daylight performance at Changdeokgung Nakseonjae that is the representative and most well preserved Korean royal palace. As a result of measuring illuminance and luminance, direct sunlight is cut off by the eaves and reflective light from the court yard comes in the inside of the floor. As the layer of window is increased, daylight is decreased and the illuminance distribution is more stable because of decreasing of illuminance changes. Also, the lower part luminance is higher than upper part of window surface because direct sunlight is cut off by the eaves. This study would be used as preliminary data for applying characteristics of lighting environment of Korean royal palace to modem architecture.

It is prevalent to research on the energy saving systems using daylight. Daylight responsive dimming systems are to automatically control lighting output by available daylight for maintaining target illuminance on the workplane. The system application is not popular because of blocked daylight by shading systems. Automated roller shading systems automatically control shade height by sun position and sky conditions. Both daylight responsive dimming systems and automated roller shading systems should be integrated for energy savings and visual luminous environment. In this research, software are developed and integrated for control of integrated systems.

The purpose of this study is to analyze daylight distribution and characteristics of light on the Korean traditional paper and to investigate a possibility as the shading systems. First of all, daylight distribution through the Korean traditional paper windows and doors of the Traditional House is analyzed at Genjaegotaek of the Asan Oeam Traditional Village. After making a model, the characteristics of light on the Korean traditional paper and Roller Shade fabric are analyzed Korean traditional paper has a good efficiency to diffuse the light and is less glare than Roller Shade fabric. In the present office buildings and apartmant houses, daylight characteristics of the Korean traditional paper windows and doors could be used as preliminary data to develop a window system which makes greatest performance of daylight.

Three anti-apoptosis genes, Ls-iap2, iap3 and p49 were found in Leucania separata multiple nuclear polyhedrovirus. Amino acid sequence homology of Ls-IAP2 and Ls-IAP3 with Op-IAP2 and Op-IAP3 from Orgyia pseddotsugata MNPV were 20% and 42%, while that of Ls-P49 is 28% with Sl-P49 from Spodoptera littorolis MNPV. Ls-IAP2 contains one baculoviral IAP repeat (BIR) domain followed by a RING domain, while Ls-IAP3 contains two BIRs and a RING. Ls-P49 contains a reactive site loop, predicted cleavage site (KKLD(74) downward arrow G) that is different from Sl-P49 (TVID(94) downward arrow G). Expressed Ls-iap3 or Ls-p49 under presence of actinomycin D in SF9 cells, DNA ladder assay revealed that Ls- IAP3 or Ls-P49 could block the apoptosis of SF9 cells induced by actinomycin D. Replication of p35 deficient-mutant Autographa californica MNPV in SF9 cells was also rescued when Ls-iap3 or Ls-p49 was expressed transiently. No anti-apoptotic activity was observed for Ls-IAP2. The results showed that both of Ls-IAP3 and Ls-P49 were functional apoptotic suppressors in SF9 cells.

This study proposes to increase the energy-saving effects by reducing excessive intensity of radiation of artificial lighting through analyzing daylight incident. A photosensor sends amounts of detected luminous flux to digital control unit(DCU) as a signal and then, it can decide dimming ratios, received a proper dimming signal from DCU. Generally it is effective to control artificial lighting with the different control ratio of each zone by setting a photosensor as same number and rows as artificial lighting. However, it is ineffective to do in initial costs of systems aspect in offices. As a result of grasping the distribution of daylight previously and analyzing daylight and dimming data, we can dim different dimming ratios to each zone of artificial lighting by a single photosensor.

The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.

In this paper, we show that low energy gamma rays down to few keV can be detected with CsI(Tl) crystal detector. A clear peak at 6 keV from a radioactive source is observed. In addition, we also show that alpha particles and gamma rays can be separated greater than 3 σ level down to 50 keV region using the different time characteristics of the crystal for both signals. With further background study, we should be able to determine CsI(Tl) be a good candidate detector in search for weakly interacting massive particles (WIMPs).

Summary form only given. Single Langmuir probe (SLP) is one of the well-known electrostatic diagnostic methods, which can measure various plasma parameters, such as electron temperature, plasma density, and plasma potential. However, the SLP cannot be applied in some plasmas, such as dust plasmas and processing plasmas containing deposition gases or dust particles, without probe tip cleaning. To overcome the weakness of the SLP, a floating harmonic method (FHM) has been recently developed and extended researches based on the FHM have been studied. This FHM measures plasma parameters using the relation between a fundamental frequency current and a second harmonic current, and thus, a careful consideration for the stray current is needed when the FHM is used. In this study, a sideband method (SBM), which is based on the FHM but no consideration of the stray current, is studied and the comparisons of the measured electron temperature and the plasma density from the conventional FHM and the SBM are investigated. The SBM can be helpful to the plasma diagnostics for the large-area plasma reactor or fusion device reactor, which has a long measurement cable length or a large amount of the stray current.

The electron bounce resonance was experimentally investigated in a low pressure planar inductively coupled plasma. The electron energy probability functions (EEPFs) were measured at different chamber heights and the energy diffusion coefficients were calculated by the kinetic model. It is found that the EEPFs begin to flatten at the first electron bounce resonance condition, and the plateau shifts to a higher electron energy as the chamber height increases. The plateau which indicates strong electron heating corresponds not only to the electron bounce resonance condition but also to the peaks of the first component of the energy diffusion coefficients. As a result, the plateau formation in the EEPFs is mainly due to the electron bounce resonance in a finite inductive discharge.

Measurement of the plasma density is investigated to study plasma dynamics by adding reactive gas (O2) or rare gas (He) in Ar plasmas. When the O2 or He gas is added, plasma density is suddenly decreased, while the plasma density recovers slowly with gas off. It is found that the recovery time is strongly dependent on the gas flow rate, and it can be explained by effect of gas residence time. When the He gas is off in the Ar plasma, the plasma density is overshot compared to the case of the O2 gas pulsing due to enhanced ionizations by metastable atoms. Analysis and calculation for correlation between the plasma density dynamics and the gas pulsing are also presented in detail.

Single-crystalline 3C-SiC heteroepitaxial layers were grown on silicon-on-insulator (SOI) and Si wafers, to investigate effects of SOI substrates on the film quality. Residual stress measurement using a laser scan method and the Raman scattering spectroscopy indicated that internal stress within SiC films on SOI were indeed reduced, when compared with that of SiC films on Si.