1. Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates
- Author
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Yann Cohin, Jean-Christophe Harmand, Olivia Mauguin, Gilles Patriarche, Ludovic Largeau, Elin Sondergard, Sophie Bouchoule, Andrea Cattoni, Frank Glas, Surface du Verre et Interfaces (SVI), Centre National de la Recherche Scientifique (CNRS)-SAINT-GOBAIN-Université Pierre et Marie Curie - Paris 6 (UPMC), Laboratoire de photonique et de nanostructures (LPN), Centre National de la Recherche Scientifique (CNRS), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Saint-Gobain-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Fabrication ,Materials science ,Annealing (metallurgy) ,Polycrystalline silicon thin films ,Nanotechnology ,02 engineering and technology ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Epitaxy ,01 natural sciences ,law.invention ,Crystallography ,Template ,law ,0103 physical sciences ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,General Materials Science ,Crystallization ,0210 nano-technology ,Nanoscopic scale - Abstract
International audience; Fiber-textured polycrystalline silicon thin films have demonstrated their interest as seed layers for the epitaxial growth of high-quality materials on substrates such as glass or plastics. In the present work, we report a comprehensive study of the aluminum-induced crystallization (AIC) of isolated Si domains. Our study not only demonstrates the fabrication by AIC of shape- and size-controlled Si monocrystals at the nanoscale but also allows for the prediction of minimal annealing conditions for complete crystallization of such structures. These ultrathin [111]-oriented monocrystals are promising candidates as selected-area epitaxy substrates with both an easy control on the morphology of these structures and a low-temperature fabrication process.
- Published
- 2015
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