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The present work reported the intrinsic mechanical behavior of vanadium dioxide (VO2) thin film deposited on a SiO2 substrate using a combination of nanoindentation tests and a theoretical model. The effect of phase transition on mechanical parameters was studied by adjusting the test temperature. A new model that can simultaneously extract the elastic modulus and hardness was derived by introducing a dimensional analysis. The results showed that the thin film exhibits a hardness of 9.43 GPa and a Young’s modulus of about 138.5 GPa at room temperature, compared with the values of 5.71 GPa and 126.9 GPa at a high temperature, respectively. It can be seen that the intrinsic mechanical parameters decrease to a certain extent after a phase transition. Finally, the numerical simulation results were consistent with those of the experiments, which verified the effectiveness of the new method. In addition, this study also provided useful guidance for mechanical tests on other ultra-thin films. © 2023 by the authors.

The buckling, de-lamination, and cracking of the thin film/substrate system caused by thermal stress is the main obstacle for functional failure. Moreover, the thermal stress of vanadium dioxide (VO2) thin film may be more complicated due to the stress re-distribution caused by phase transition. Therefore, the thermal stress of VO2 thin films deposited on four substrates with different materials (fused silica, silicon slice, sapphire, and glass) has been studied by finite element method in the present work. The influences of external temperature, substrate, and interlayer on thermal stress were analyzed. It was found that the substrates can greatly affect the thermal stresses, which were mainly caused by the mismatch of coefficient of thermal expansion (CTE). The thermal stress had a linear relationship with the external temperature, but this tendency would be redistributed or even change direction when phase transition occurred. The simulated results were in tandem with the analytical method. Meanwhile, the radial stress and shear stress distribution under the influence of phase transition were calculated. In addition, the reduction of thermal stress and shear stress showed that the appropriate interlayer can enhance the adhesive strength effectively. © 2022 by the authors.